MEMS high-Q micro-filters offer a combination of compact size and high performance. The fabrication process for resonant structures yield accuracies to 1 micron, allowing repeatability of an identical frequency response in mass production. Structural parts including resonators are silicon based with gold plating. Products hermetically sealed at the wafer level ensure no contaminants can enter to shift frequency or degrade metal conductivity. These fully fully shielded MEMS products are free from planar radiation losses, leakage, or cross coupling. Standard RF installation involves securing the base of the MEMS product to the circuit board with solder or conductive epoxy and simply ribbon bonding each port to a microstrip line.