CyberOptics Semiconductor introduced the WaferSense Airborne Particle Sensors (APS) early this year. The only semiconductor sensor of its kind to identify particle sources in tool, the APS moves through semiconductor process equipment and automation material handing systems to monitor airborne particles, reporting information in real-time to allow engineers to efficiently validate wafer contamination. With a wafer-like shape compatible with existing automation and wireless communication providing real-time data, the Airborne Particle Sensor speeds tool qualification and release to production. APS reduces time locating particle sources.
For more information on the Airborne Particle Sensor, please refer to our web site at http://www.cyberopticssemi.com/products/wafersense/aps/ .
For more information on the event, refer to ISMI Manufacturing Week at http://www.sematech.org/cgi-bin/ismisym/agenda.cgi#session2_18 .
Posted by Janine E. Mooney, Associate Editor