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Test System for CMOS Processes

Wed, 06/01/2005 - 7:22am
Keithley announces the S510 Semiconductor Reliability Test System, a high channel count, turnkey solution for use in reliability testing and lifetime modeling of the ULSI CMOS processes at the 65nm node and beyond. It provides a high degree of wafer-level reliability (WLR) test throughput and flexibility, reducing the time to assess reliability and to perform lifetime modeling. The S510 System can also be used for production WLR monitoring or as a lab parametric test system. The system features scalable channel counts from 20 to 72 channels, an independent stress/measure channel for each structure and simultaneous measurement across all channels. The product can test multiple devices simultaneously on a wafer in conjunction with a semi-automatic or fully automatic probe station.
Keithley Instruments, Inc.
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