SoftMEMS announces the release of a new version of its product MEMS Pro. MEMS Pro is a flexible CAD tool suite for the design and analysis of MEMS including their associated electronics and packaging. It offers an integrated solution for the design process that shortens development time while providing designer’s analysis before manufacture. SoftMEMS tools are integrated within IC and CAM design environments. Functionalities include mixed MEMS/IC schematic capture and simulation, full custom mask layout capabilities, MEMS specific layout productivity tools and design verification, 3D model generation and visualization, behavioral model creation and links to 3D analysis packages. Special features have been integrated into MEMS Pro 5.1 for better interoperability with finite element solvers offering more output formats for 3D geometries, better material properties handling and improved automatic meshing capabilities. The link between 2D layout and 3D modeling has also been improved by automatic translation of curvilinear shapes used in MEMS from polygonized GDSII masks. Finally, MEMS Pro v5.1 has enhanced libraries for system level models including expanded support for mixed electronic/optical devices and a methodology for Design for Manufacturing is illustrated.