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On-wafer Probe

Fri, 11/01/2002 - 6:09am

The Infinity Probe™ offers both high frequency performance and low stable contact resistance on aluminum pads (typically <0.1 Ohm). The probe tip contact area is approximately 12 um × 12 um, ensures minimal damage to the pad, and allows good contact with pads as small as 50 um × 50 um. The force delivery of the probe is such that only a small horizontal motion is necessary to break through the aluminum oxide to make contact with the pad.

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