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SiC Heaters

Tue, 06/04/2002 - 9:35am
MAC's Silicon Carbide (SiC) heaters are ideal for semiconductor and electronics applications. These heaters are designed for use in process chambers where rapid heating to high temperature, with low contamination, is necessary.

Fabricated from high purity Chemical Vapor Deposition (CVD), the heaters have a high thermal conductivity and excellent thermal shock resistance. They offer a low outgassing rate and a low thermal mass. The SiC heaters also have low contact resistance to electrodes and a uniform electrical resistivity of .010 ohm-cm.

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