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Probe Portfolio

Mon, 07/23/2001 - 5:08am
Drawing on the company's knowledge of MEMS equipment and probe systems, Karl Suss has added vacuum and cryogenic stations to its range of analytical probe systems. Called the PAV and PAC systems, these probers give the company entry into the market for testing infrared sensor arrays, superconductors and pressure or vacuum related MEMS including micro-mirrors (optical networking) across a temperature range of +150 ° C down to 4 K, depending on the application.

The new systems are available in a variety of configurations, depending on the application to be performed by the customer. Options include a range of tools from low cost laboratory stations to sophisticated systems with automatic loading and alignment capabilities.

One application for the PAV and PAC systems includes using the vacuum probe systems to test MEMS with micro-mechanically operated high frequency optical switches, such as micro-mirrors for optical networking. Due to the resistance caused by ambient air, such switches must be tested in a vacuum. Using the Suss ProbeChamber, the test is carried out with a controlled up-stream chamber pressure. Both high and low temperatures can be used to additionally stress the device during functional testing.

Another application is testing focal-plane-arrays infrared (FPA IR) systems at their operating temperature, which typically ranges from 80K to 65 K. For modern hybrid FPAs, the tests have to be carried out on the IR-sensitive layer as well as on the signal-transmission layer after bonding. Smooth, fine probe tips are used to ensure a non-destructive contact as well as precise positioning. Specially designed high vacuum or cryogenic ProbeCards are used for testing the read-out devices. Using an optional Suss CryoShield to cover the device under test (DUT) minimizes the ambient chamber radiation.

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